Recently, touch screen panel (TSP) is becoming larger in size from smart phones to tablePC, large-sized advertising touch panel and etc. When the size of screen becomes larger problem ofslowed response speed occurs, using ITO electrode as sensor electrode. To solve this problem, newtechnology is in development that uses nano silver paste instead of ITO as sensor electrode. In thisresearch, as a new synthesis method, nano silver powder has been developed by electron beam. Bycompounding the newly developed nano silver powder and original submicron silver powder, Hybridsilver paste has been produced. Using the produced paste, 4㎛, 7㎛ micro patterns were realized.